Comparison of Implant Charging Results Obtained with QUANTOX® and CHARM®-2
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چکیده
A comparison of charging results obtained with Quantox and CHARM-2 is presented for the case of Arsenic implants at 80 KeV and 20 KeV, performed at doses of 5e14 /cm2 and 5e15 /cm2 at beam currents of 9 mA and 18 mA. The surface potential maps obtained by the Quantox are compared to the potentials and currents measured on the CHARM sensors, with the plasma charge control system on and off. The sensitivity of the Quantox system is compared for changes in the oxide thickness, the dose, and the beam density.
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تاریخ انتشار 1998